mlsanityData to 14 Oct 2026

Scalability of Reinforcement Learning Methods for Dispatching in Semiconductor Frontend Fabs: A Comparison of Open-Source Models with Real Industry Datasets

arXiv 2505.11135 ↗First posted 16 May 2025cs.AI cs.LG cs.NEcited by 1

On the map: Deep reinforcement learning methods → RL for energy, networks and operations

Abstract (arXiv)

Benchmark datasets are crucial for evaluating approaches to scheduling or dispatching in the semiconductor industry during the development and deployment phases. However, commonly used benchmark datasets like the Minifab or SMT2020 lack the complex details and constraints found in real-world scenarios. To mitigate this shortcoming, we compare open-source simulation models with a real industry dataset to evaluate how optimization methods scale with different levels of complexity. Specifically, we focus on Reinforcement Learning methods, performing optimization based on policy-gradient and Evolution Strategies. Our research provides insights into the effectiveness of these optimization methods and their applicability to realistic semiconductor frontend fab simulations. We show that our proposed Evolution Strategies-based method scales much better than a comparable policy-gradient-based approach. Moreover, we identify the selection and combination of relevant bottleneck tools to control by the agent as crucial for an efficient optimization. For the generalization across different loading scenarios and stochastic tool failure patterns, we achieve advantages when utilizing a diverse training dataset. While the overall approach is computationally expensive, it manages to scale well with the number of CPU cores used for training. For the real industry dataset, we achieve an improvement of up to 4% regarding tardiness and up to 1% regarding throughput. For the less complex open-source models Minifab and SMT2020, we observe double-digit percentage improvement in tardiness and single digit percentage improvement in throughput by use of Evolution Strategies.

Key facts. Cited by 1 paper in the map (data through 14 Oct 2026). Placed in RL for energy, networks and operations, one of 15 directions in Deep reinforcement learning methods. Builds on 10 of its 75 references that are in the map. First posted on arXiv 16 May 2025.

Builds on

10 of 75 references.

References · 10

  1. 2017Attention Is All You Needcited by 60,361
  2. 2017Proximal Policy Optimization Algorithmscited by 15,215
  3. 2013Playing Atari with Deep Reinforcement Learningcited by 3,274
  4. 2015Trust Region Policy Optimizationcited by 2,580
  5. 2016Asynchronous Methods for Deep Reinforcement Learningcited by 2,258
  6. 2015Deep Reinforcement Learning with Double Q-learningcited by 1,745
  7. 2017Evolution Strategies as a Scalable Alternative to Reinforcement Learningcited by 574
  8. 2019Graph Transformer Networkscited by 523
  9. 2021A Reinforcement Learning Environment For Job-Shop Schedulingcited by 21
  10. 2014A MILP model for an extended version of the Flexible Job Shop Problemcited by 5

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Citing papers per year: 2025: 1.

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  1. 2026Event-Driven Reinforcement Learning Enables Long-Horizon Control in Semiconductor Fabrication
  2. 2026LLMs as Adaptive Meta-Solvers: Strategy-Diverse RL for Industrial-Scale Optimization
  3. 2025Simulation-Driven Reinforcement Learning in Queuing Network Routing Optimization
  4. 2026Reinforcement Learning-Based Production Scheduling in an Industry-Based Coating Scenario Using the Digital Model Playground
  5. 2026Diverse Approaches to Optimal Execution Schedule Generation
  6. 2026When does learning pay off? A study on DRL-based dynamic algorithm configuration for carbon-aware scheduling
  7. 2026PORL: Pretrained Offline Reinforcement Learning for the Job Shop Scheduling Problem
  8. 2025Leveraging Genetic Algorithms for Efficient Demonstration Generation in Real-World Reinforcement Learning Environments