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Neural Lithography: Close the Design-to-Manufacturing Gap in Computational Optics with a 'Real2Sim' Learned Photolithography Simulator

arXiv 2309.17343 ↗First posted 29 Sep 2023physics.optics cs.AI cs.CVcited by 0

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Abstract (arXiv)

We introduce neural lithography to address the 'design-to-manufacturing' gap in computational optics. Computational optics with large design degrees of freedom enable advanced functionalities and performance beyond traditional optics. However, the existing design approaches often overlook the numerical modeling of the manufacturing process, which can result in significant performance deviation between the design and the fabricated optics. To bridge this gap, we, for the first time, propose a fully differentiable design framework that integrates a pre-trained photolithography simulator into the model-based optical design loop. Leveraging a blend of physics-informed modeling and data-driven training using experimentally collected datasets, our photolithography simulator serves as a regularizer on fabrication feasibility during design, compensating for structure discrepancies introduced in the lithography process. We demonstrate the effectiveness of our approach through two typical tasks in computational optics, where we design and fabricate a holographic optical element (HOE) and a multi-level diffractive lens (MDL) using a two-photon lithography system, showcasing improved optical performance on the task-specific metrics.

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References · 15

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3 more
  1. 2021CodedStereo: Learned Phase Masks for Large Depth-of-field Stereocited by 10
  2. 2022Large Scale Mask Optimization Via Convolutional Fourier Neural Operator and Litho-Guided Self Trainingcited by 8
  3. 2022Waveguide Holography: Towards True 3D Holographic Glassescited by 3

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