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AI-assisted Human-in-the-Loop Web Platform for Structural Characterization in Hard drive design

arXiv 2604.00359 ↗First posted 1 Apr 2026cond-mat.mtrl-sci cs.CVcited by 0

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Abstract (arXiv)

Scanning transmission electron microscopy (STEM) has become a cornerstone instrument for semiconductor materials metrology, enabling nanoscale analysis of complex multilayer structures that define device performance. Developing effective metrology workflows for such systems requires balancing automation with flexibility; rigid pipelines are brittle to sample variability, while purely manual approaches are slow and subjective. Here, we present a tunable human-AI-assisted workflow framework that enables modular and adaptive analysis of STEM images for device characterization. As an illustrative example, we demonstrate a workflow for automated layer thickness and interface roughness quantification in multilayer thin films. The system integrates gradient-based peak detection with interactive correction modules, allowing human input at the design stage while maintaining fully automated execution across samples. Implemented as a web-based interface, it processes TEM/EMD files directly, applies noise reduction and interface tracking algorithms, and outputs statistical roughness and thickness metrics with nanometer precision. This architecture exemplifies a general approach toward adaptive, reusable metrology workflows - bridging human insight and machine precision for scalable, standardized analysis in semiconductor manufacturing. The code is made available at https://github.com/utkarshp1161/thickness-mapping-webapp

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References · 10

  1. 2023Segment Anythingcited by 8,158
  2. 2021A Survey of Human-in-the-loop for Machine Learningcited by 214
  3. 2021A Deep Learning Based Automatic Defect Analysis Framework for In-situ TEM Ion Irradiationscited by 10
  4. 2024Integration of Scanning Probe Microscope with High-Performance Computing: fixed-policy and reward-driven workflows implementationcited by 6
  5. 2024SAM-I-Am: Semantic Boosting for Zero-shot Atomic-Scale Electron Micrograph Segmentationcited by 5
  6. 2024Building Workflows for Interactive Human in the Loop Automated Experiment (hAE) in STEM-EELScited by 5
  7. 2024Unsupervised Reward-Driven Image Segmentation in Automated Scanning Transmission Electron Microscopy Experimentscited by 3
  8. 2022Semi-supervised machine learning model for analysis of nanowire morphologies from transmission electron microscopy imagescited by 2
  9. 2024Segment Anything Model for Grain Characterization in Hard Drive Designcited by 2
  10. 2024On machine learning analysis of atomic force microscopy images for image classification, sample surface recognitioncited by 1

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