# Morphology-Aware Ambiguity Learning for Wafer Defect Decision Support

arXiv: https://arxiv.org/abs/2609.21866 · HTML: https://mlsanity.com/paper/2609.21866/

## Key facts

- No citing papers in the map yet (data through 14 Oct 2026).
- Builds on 11 of its 44 references that are in the map.
- First posted on arXiv 18 Sep 2026.

## Builds on (most cited first, 11 of 11)

- [Deep Residual Learning for Image Recognition](https://mlsanity.com/paper/1512.03385/) (2015)
- [Swin Transformer: Hierarchical Vision Transformer using Shifted Windows](https://mlsanity.com/paper/2103.14030/) (2021)
- [EfficientNet: Rethinking Model Scaling for Convolutional Neural Networks](https://mlsanity.com/paper/1905.11946/) (2019)
- [Rethinking the Inception Architecture for Computer Vision](https://mlsanity.com/paper/1512.00567/) (2015)
- [MobileNetV2: Inverted Residuals and Linear Bottlenecks](https://mlsanity.com/paper/1801.04381/) (2018)
- [Normalizing Flows for Probabilistic Modeling and Inference](https://mlsanity.com/paper/1912.02762/) (2019)
- [ShuffleNet V2: Practical Guidelines for Efficient CNN Architecture Design](https://mlsanity.com/paper/1807.11164/) (2018)
- [Selective Classification for Deep Neural Networks](https://mlsanity.com/paper/1705.08500/) (2017)
- [SelectiveNet: A Deep Neural Network with an Integrated Reject Option](https://mlsanity.com/paper/1901.09192/) (2019)
- [Label Distribution Learning](https://mlsanity.com/paper/1408.6027/) (2014)
- [Deep Label Distribution Learning with Label Ambiguity](https://mlsanity.com/paper/1611.01731/) (2016)

## Abstract (arXiv)

Wafer map defect recognition is commonly formulated as a fixed-taxonomy classification problem that assigns each wafer to a single defect class. However, some wafers exhibit morphologies near class boundaries, for which forcing a single prediction may be less informative than providing plausible diagnostic alternatives. This paper proposes a morphology-aware ambiguity learning framework that supports three diagnostic actions: automatic single-class diagnosis, assisted diagnosis with two plausible defect classes, and full review. Using the radial, angular, and geometric characteristics of training wafer maps, the framework constructs a class-level ambiguity matrix representing defect-class pairs with similar morphology and plausible diagnostic alternatives. It guides the model to learn plausible alternative classes rather than treating all incorrect classes equally. During inference, the matrix determines whether an uncertain prediction can be represented by a meaningful two-class diagnostic set or should be escalated for full review. Experiments on WM-811K show that the proposed framework outperforms conventional approaches in defect recognition and diagnostic decision support, providing meaningful two-class alternatives while reserving full review for cases with unresolved ambiguity. Illustrative cost analyses further show the potential cost advantage of the proposed routing strategy. The diagnostic behavior of the framework remains consistent across different backbone architectures.