# Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science

arXiv: https://arxiv.org/abs/2609.12139 · HTML: https://mlsanity.com/paper/2609.12139/

## Key facts

- No citing papers in the map yet (data through 14 Oct 2026).
- Builds on 2 of its 20 references that are in the map.
- First posted on arXiv 10 Sep 2026.

## Builds on (most cited first, 2 of 2)

- [LLMs4SchemaDiscovery: A Human-in-the-Loop Workflow for Scientific Schema Mining with Large Language Models](https://mlsanity.com/paper/2504.00752/) (2025)
- [OntoLearner: A Modular Python Library for Ontology Learning with Large Language Models](https://mlsanity.com/paper/2607.01977/) (2026)

## Abstract (arXiv)

Atomic layer deposition (ALD) and atomic layer etching (ALE) are reported heterogeneously across experimental and simulation literature in materials science, hindering comparison and machine-actionable reuse. We present four domain-expert-reviewed JSON Schemas for ALD and ALE experimental and simulation processes. Curated with schema-miner and grounded in QUDT using schema-miner pro, the schemas structure materials, process conditions, configurations , and measured or predicted results. We compare their scope, structure, and semantic grounding, and demonstrate their use for schema-guided literature extraction and publication of structured records through ORKG templates.