# SePArate: Segmenting Patterns from Defects in Wafer Manufacturing Using Weak Supervision

arXiv: https://arxiv.org/abs/2608.30410 · HTML: https://mlsanity.com/paper/2608.30410/

## Key facts

- No citing papers in the map yet (data through 14 Oct 2026).
- Builds on 7 of its 25 references that are in the map.
- First posted on arXiv 31 Aug 2026.

## Builds on (most cited first, 7 of 7)

- [U-Net: Convolutional Networks for Biomedical Image Segmentation](https://mlsanity.com/paper/1505.04597/) (2015)
- [Segment Anything](https://mlsanity.com/paper/2304.02643/) (2023)
- [Grad-CAM: Visual Explanations from Deep Networks via Gradient-based Localization](https://mlsanity.com/paper/1610.02391/) (2016)
- [V-Net: Fully Convolutional Neural Networks for Volumetric Medical Image Segmentation](https://mlsanity.com/paper/1606.04797/) (2016)
- [Grounded SAM: Assembling Open-World Models for Diverse Visual Tasks](https://mlsanity.com/paper/2401.14159/) (2024)
- [Image Segmentation Using Text and Image Prompts](https://mlsanity.com/paper/2112.10003/) (2021)
- [WaferSegClassNet -- A Light-weight Network for Classification and Segmentation of Semiconductor Wafer Defects](https://mlsanity.com/paper/2207.00960/) (2022)

## Abstract (arXiv)

In semiconductor manufacturing, defect analysis is essential, but manual inspection cannot scale. However, existing automated inspection methods remain insufficient for root-cause analysis and process optimization. To this end, we present SePArate, a weakly supervised wafer defect segmentation method. SePArate enables pixel-level separation of patterns by leveraging only image-level annotations. It consists of a three-phase training: encoder pretraining, knowledge transfer to learn spatial cues, and training on synthetic mixed-defect data for accurate segmentation. Experiments demonstrate that SePArate outperforms the baselines.