# Does Super-Resolution Preserve Defect Evidence? A Low-False-Call Benchmark for Semiconductor Inspection

arXiv: https://arxiv.org/abs/2607.17401 · HTML: https://mlsanity.com/paper/2607.17401/

## Key facts

- Cited by 1 papers in the map (data through 14 Oct 2026).
- Builds on 25 of its 45 references that are in the map.
- First posted on arXiv 19 Jul 2026.

## Builds on (most cited first, 25 of 25)

- [U-Net: Convolutional Networks for Biomedical Image Segmentation](https://mlsanity.com/paper/1505.04597/) (2015)
- [On Calibration of Modern Neural Networks](https://mlsanity.com/paper/1706.04599/) (2017)
- [Fully Convolutional Networks for Semantic Segmentation](https://mlsanity.com/paper/1411.4038/) (2014)
- [Rethinking Atrous Convolution for Semantic Image Segmentation](https://mlsanity.com/paper/1706.05587/) (2017)
- [Photo-Realistic Single Image Super-Resolution Using a Generative Adversarial Network](https://mlsanity.com/paper/1609.04802/) (2016)
- [SwinIR: Image Restoration Using Swin Transformer](https://mlsanity.com/paper/2108.10257/) (2021)
- [Enhanced Deep Residual Networks for Single Image Super-Resolution](https://mlsanity.com/paper/1707.02921/) (2017)
- [Image Super-Resolution via Iterative Refinement](https://mlsanity.com/paper/2104.07636/) (2021)
- [Image Super-Resolution Using Very Deep Residual Channel Attention Networks](https://mlsanity.com/paper/1807.02758/) (2018)
- [ESRGAN: Enhanced Super-Resolution Generative Adversarial Networks](https://mlsanity.com/paper/1809.00219/) (2018)
- [Real-ESRGAN: Training Real-World Blind Super-Resolution with Pure Synthetic Data](https://mlsanity.com/paper/2107.10833/) (2021)
- [Accurate Image Super-Resolution Using Very Deep Convolutional Networks](https://mlsanity.com/paper/1511.04587/) (2015)
- [Pre-Trained Image Processing Transformer](https://mlsanity.com/paper/2012.00364/) (2020)
- [Residual Dense Network for Image Super-Resolution](https://mlsanity.com/paper/1802.08797/) (2018)
- [Simple Baselines for Image Restoration](https://mlsanity.com/paper/2204.04676/) (2022)
- [PaDiM: a Patch Distribution Modeling Framework for Anomaly Detection and Localization](https://mlsanity.com/paper/2011.08785/) (2020)
- [Designing a Practical Degradation Model for Deep Blind Image Super-Resolution](https://mlsanity.com/paper/2103.14006/) (2021)
- [Deep Laplacian Pyramid Networks for Fast and Accurate Super-Resolution](https://mlsanity.com/paper/1704.03915/) (2017)
- [Activating More Pixels in Image Super-Resolution Transformer](https://mlsanity.com/paper/2205.04437/) (2022)
- [Toward Real-World Single Image Super-Resolution: A New Benchmark and A New Model](https://mlsanity.com/paper/1904.00523/) (2019)
- [Task-Driven Super Resolution: Object Detection in Low-resolution Images](https://mlsanity.com/paper/1803.11316/) (2018)
- [The MVTec AD 2 Dataset: Advanced Scenarios for Unsupervised Anomaly Detection](https://mlsanity.com/paper/2503.21622/) (2025)
- [Beyond Image Super-Resolution for Image Recognition with Task-Driven Perceptual Loss](https://mlsanity.com/paper/2404.01692/) (2024)
- [Automated Semiconductor Defect Inspection in Scanning Electron Microscope Images: a Systematic Review](https://mlsanity.com/paper/2308.08376/) (2023)
- [Beyond Visual Fidelity: Benchmarking Super-Resolution Models for Large-Scale Remote Sensing Imagery via Downstream Task Integration](https://mlsanity.com/paper/2605.00310/) (2026)

## Built on by (most cited first, 1 of 1)

- [SafeRestore: Detector-Relative Risk Certificates for Selective Industrial Image Restoration](https://mlsanity.com/paper/2609.03475/) (2026)

## Abstract (arXiv)

Super-resolution can make inspection images appear sharper without preserving the evidence needed to detect a defect. We study this failure mode with a benchmark that separates reconstruction from detection and evaluates both at a predeclared low false-positive rate. Ten end-to-end repetitions combine independently generated line/space and contact-hole images with model training, calibration, clean controls, weak defects, and a held-out defect morphology. Every reconstruction is scored by the same local residual detector, while direct and jointly trained detectors form a separate comparison track. Reconstruction fidelity and inspection utility diverge: the two learned reconstruction models attain the highest structural similarity yet detect fewer defect pixels than bicubic interpolation in every paired repetition. A direct DeepLabV3 detector reaches 0.1984±0.0385 recall at 0.000174±0.000084 false-positive rate and satisfies the held-out feasibility criterion in all ten repetitions. An illustrative joint model, DPU-WaferSR, passes independent clean calibration but exceeds the held-out limit in all ten repetitions, demonstrating that calibration success does not guarantee transfer. Weak-defect recall remains near zero for every feasible method. Applying the unchanged policies to 4,591 public Carinthia-S masks further reveals large method-dependent shifts on real SEM texture. These results support a simple conclusion: super-resolution for inspection should be judged by preserved task evidence and operating-point transfer, not reconstruction quality alone.