# Unsupervised Integrated-Circuit Defect Segmentation via Image-Intrinsic Normality

arXiv: https://arxiv.org/abs/2509.09375 · HTML: https://mlsanity.com/paper/2509.09375/

## Key facts

- No citing papers in the map yet (data through 14 Oct 2026).
- Builds on 9 of its 16 references that are in the map.
- First posted on arXiv 11 Sep 2025.

## Builds on (most cited first, 9 of 9)

- [DINOv2: Learning Robust Visual Features without Supervision](https://mlsanity.com/paper/2304.07193/) (2023)
- [WinCLIP: Zero-/Few-Shot Anomaly Classification and Segmentation](https://mlsanity.com/paper/2303.14814/) (2023)
- [AnomalyCLIP: Object-agnostic Prompt Learning for Zero-shot Anomaly Detection](https://mlsanity.com/paper/2310.18961/) (2023)
- [AnomalyGPT: Detecting Industrial Anomalies Using Large Vision-Language Models](https://mlsanity.com/paper/2308.15366/) (2023)
- [AA-CLIP: Enhancing Zero-shot Anomaly Detection via Anomaly-Aware CLIP](https://mlsanity.com/paper/2503.06661/) (2025)
- [MuSc: Zero-Shot Industrial Anomaly Classification and Segmentation with Mutual Scoring of the Unlabeled Images](https://mlsanity.com/paper/2401.16753/) (2024)
- [TransFusion -- A Transparency-Based Diffusion Model for Anomaly Detection](https://mlsanity.com/paper/2311.09999/) (2023)
- [GLAD: Towards Better Reconstruction with Global and Local Adaptive Diffusion Models for Unsupervised Anomaly Detection](https://mlsanity.com/paper/2406.07487/) (2024)
- [FabGPT: An Efficient Large Multimodal Model for Complex Wafer Defect Knowledge Queries](https://mlsanity.com/paper/2407.10810/) (2024)

## Abstract (arXiv)

Modern Integrated-Circuit(IC) manufacturing introduces diverse, fine-grained defects that depress yield and reliability. Most industrial defect segmentation compares a test image against an external normal set, a strategy that is brittle for IC imagery where layouts vary across products and accurate alignment is difficult. We observe that defects are predominantly local, while each image still contains rich, repeatable normal patterns. We therefore propose an unsupervised IC defect segmentation framework that requires no external normal support. A learnable normal-information extractor aggregates representative normal features from the test image, and a coherence loss enforces their association with normal regions. Guided by these features, a decoder reconstructs only normal content; the reconstruction residual then segments defects. Pseudo-anomaly augmentation further stabilizes training. Experiments on datasets from three IC process stages show consistent improvements over existing approaches and strong robustness to product variability.