# Exploring Active Learning for Semiconductor Defect Segmentation

arXiv: https://arxiv.org/abs/2507.17359 · HTML: https://mlsanity.com/paper/2507.17359/

## Key facts

- No citing papers in the map yet (data through 14 Oct 2026).
- Builds on 13 of its 20 references that are in the map.
- First posted on arXiv 23 Jul 2025.

## Builds on (most cited first, 13 of 13)

- [Deep Residual Learning for Image Recognition](https://mlsanity.com/paper/1512.03385/) (2015)
- [U-Net: Convolutional Networks for Biomedical Image Segmentation](https://mlsanity.com/paper/1505.04597/) (2015)
- [A Simple Framework for Contrastive Learning of Visual Representations](https://mlsanity.com/paper/2002.05709/) (2020)
- [Momentum Contrast for Unsupervised Visual Representation Learning](https://mlsanity.com/paper/1911.05722/) (2019)
- [Exploring Simple Siamese Representation Learning](https://mlsanity.com/paper/2011.10566/) (2020)
- [Improved Baselines with Momentum Contrastive Learning](https://mlsanity.com/paper/2003.04297/) (2020)
- [Deep Batch Active Learning by Diverse, Uncertain Gradient Lower Bounds](https://mlsanity.com/paper/1906.03671/) (2019)
- [Learning Loss for Active Learning](https://mlsanity.com/paper/1905.03677/) (2019)
- [Variational Adversarial Active Learning](https://mlsanity.com/paper/1904.00370/) (2019)
- [Sequential Graph Convolutional Network for Active Learning](https://mlsanity.com/paper/2006.10219/) (2020)
- [Self-Damaging Contrastive Learning](https://mlsanity.com/paper/2106.02990/) (2021)
- [Rethinking deep active learning: Using unlabeled data at model training](https://mlsanity.com/paper/1911.08177/) (2019)
- [Deep Active Learning for Biased Datasets via Fisher Kernel Self-Supervision](https://mlsanity.com/paper/2003.00393/) (2020)

## Abstract (arXiv)

The development of X-Ray microscopy (XRM) technology has enabled non-destructive inspection of semiconductor structures for defect identification. Deep learning is widely used as the state-of-the-art approach to perform visual analysis tasks. However, deep learning based models require large amount of annotated data to train. This can be time-consuming and expensive to obtain especially for dense prediction tasks like semantic segmentation. In this work, we explore active learning (AL) as a potential solution to alleviate the annotation burden. We identify two unique challenges when applying AL on semiconductor XRM scans: large domain shift and severe class-imbalance. To address these challenges, we propose to perform contrastive pretraining on the unlabelled data to obtain the initialization weights for each AL cycle, and a rareness-aware acquisition function that favors the selection of samples containing rare classes. We evaluate our method on a semiconductor dataset that is compiled from XRM scans of high bandwidth memory structures composed of logic and memory dies, and demonstrate that our method achieves state-of-the-art performance.