# Tool-to-Tool Matching Analysis Based Difference Score Computation Methods for Semiconductor Manufacturing

arXiv: https://arxiv.org/abs/2507.10564 · HTML: https://mlsanity.com/paper/2507.10564/

## Key facts

- No citing papers in the map yet (data through 14 Oct 2026).
- Builds on 8 of its 53 references that are in the map.
- First posted on arXiv 7 Jul 2025.

## Builds on (most cited first, 8 of 8)

- [Semi-Supervised Classification with Graph Convolutional Networks](https://mlsanity.com/paper/1609.02907/) (2016)
- [Graph Attention Networks](https://mlsanity.com/paper/1710.10903/) (2017)
- [Neural Message Passing for Quantum Chemistry](https://mlsanity.com/paper/1704.01212/) (2017)
- [Graph Neural Networks: A Review of Methods and Applications](https://mlsanity.com/paper/1812.08434/) (2018)
- [Graph Neural Network-Based Anomaly Detection in Multivariate Time Series](https://mlsanity.com/paper/2106.06947/) (2021)
- [Multivariate Time-series Anomaly Detection via Graph Attention Network](https://mlsanity.com/paper/2009.02040/) (2020)
- [1D Convolutional Neural Networks and Applications: A Survey](https://mlsanity.com/paper/1905.03554/) (2019)
- [Autoencoder-based Representation Learning from Heterogeneous Multivariate Time Series Data of Mechatronic Systems](https://mlsanity.com/paper/2104.02784/) (2021)

## Abstract (arXiv)

We consider the problem of tool-to-tool matching (TTTM), also called, chamber matching in the context of a semiconductor manufacturing equipment. Traditional TTTM approaches utilize static configuration data or depend on a golden reference which are difficult to obtain in a commercial manufacturing line. Further, existing methods do not extend very well to a heterogeneous setting, where equipment are of different make-and-model, sourced from different equipment vendors. We propose novel TTTM analysis pipelines to overcome these issues. We hypothesize that a mismatched equipment would have higher variance and/or higher number of modes in the data. Our best univariate method achieves a correlation coefficient >0.95 and >0.5 with the variance and number of modes, respectively showing that the proposed methods are effective. Also, the best multivariate method achieves a correlation coefficient >0.75 with the top-performing univariate methods, showing its effectiveness. Finally, we analyze the sensitivity of the multivariate algorithms to the algorithm hyper-parameters.