# Physics-guided and fabrication-aware inverse design of photonic devices using diffusion models

arXiv: https://arxiv.org/abs/2504.17077 · HTML: https://mlsanity.com/paper/2504.17077/

## Key facts

- Cited by 1 papers in the map (data through 14 Oct 2026).
- Placed in Flow matching, time series and science, one of 14 directions in Diffusion models.
- Builds on 15 of its 46 references that are in the map.
- First posted on arXiv 23 Apr 2025.

## Placed in

- Diffusion models / [Flow matching, time series and science](https://mlsanity.com/diffusion/flow-matching-time-series-and-science/)

## Builds on (most cited first, 15 of 15)

- [Denoising Diffusion Probabilistic Models](https://mlsanity.com/paper/2006.11239/) (2020)
- [U-Net: Convolutional Networks for Biomedical Image Segmentation](https://mlsanity.com/paper/1505.04597/) (2015)
- [Diffusion Models Beat GANs on Image Synthesis](https://mlsanity.com/paper/2105.05233/) (2021)
- [Deep Unsupervised Learning using Nonequilibrium Thermodynamics](https://mlsanity.com/paper/1503.03585/) (2015)
- [Generative Modeling by Estimating Gradients of the Data Distribution](https://mlsanity.com/paper/1907.05600/) (2019)
- [Improved Denoising Diffusion Probabilistic Models](https://mlsanity.com/paper/2102.09672/) (2021)
- [Diffusion Posterior Sampling for General Noisy Inverse Problems](https://mlsanity.com/paper/2209.14687/) (2022)
- [Improving Diffusion Models for Inverse Problems using Manifold Constraints](https://mlsanity.com/paper/2206.00941/) (2022)
- [Global optimization of dielectric metasurfaces using a physics-driven neural network](https://mlsanity.com/paper/1906.04157/) (2019)
- [Self-Guided Generation of Minority Samples Using Diffusion Models](https://mlsanity.com/paper/2407.11555/) (2024)
- [Freeform Diffractive Metagrating Design Based on Generative Adversarial Networks](https://mlsanity.com/paper/1811.12436/) (2018)
- [Inverse design of photonic devices with strict foundry fabrication constraints](https://mlsanity.com/paper/2201.12965/) (2022)
- [Diffusion Probabilistic Model Based Accurate and High-Degree-of-Freedom Metasurface Inverse Design](https://mlsanity.com/paper/2304.13038/) (2023)
- [Guided Diffusion for Fast Inverse Design of Density-based Mechanical Metamaterials](https://mlsanity.com/paper/2401.13570/) (2024)
- [Diffusion Generative Inverse Design](https://mlsanity.com/paper/2309.02040/) (2023)

## Built on by (most cited first, 1 of 1)

- [Physics-informed generative AI for semiconductor manufacturing: Enforcing hard physical constraints in generative models by construction](https://mlsanity.com/paper/2606.11247/) (2026)

## Abstract (arXiv)

Designing free-form photonic devices is fundamentally challenging due to the vast number of possible geometries and the complex requirements of fabrication constraints. Traditional inverse-design approaches--whether driven by human intuition, global optimization, or adjoint-based gradient methods--often involve intricate binarization and filtering steps, while recent deep learning strategies demand prohibitively large numbers of simulations (10^5 to 10^6). To overcome these limitations, we present AdjointDiffusion, a physics-guided framework that integrates adjoint sensitivity gradients into the sampling process of diffusion models. AdjointDiffusion begins by training a diffusion network on a synthetic, fabrication-aware dataset of binary masks. During inference, we compute the adjoint gradient of a candidate structure and inject this physics-based guidance at each denoising step, steering the generative process toward high figure-of-merit (FoM) solutions without additional post-processing. We demonstrate our method on two canonical photonic design problems--a bent waveguide and a CMOS image sensor color router--and show that our method consistently outperforms state-of-the-art nonlinear optimizers (such as MMA and SLSQP) in both efficiency and manufacturability, while using orders of magnitude fewer simulations (approximately 2 x 10^2) than pure deep learning approaches (approximately 10^5 to 10^6). By eliminating complex binarization schedules and minimizing simulation overhead, AdjointDiffusion offers a streamlined, simulation-efficient, and fabrication-aware pipeline for next-generation photonic device design. Our open-source implementation is available at https://github.com/dongjin-seo2020/AdjointDiffusion.