# Utilizing Generative Adversarial Networks for Image Data Augmentation and Classification of Semiconductor Wafer Dicing Induced Defects

arXiv: https://arxiv.org/abs/2407.20268 · HTML: https://mlsanity.com/paper/2407.20268/

## Key facts

- Cited by 1 papers in the map (data through 14 Oct 2026).
- Builds on 13 of its 26 references that are in the map.
- First posted on arXiv 24 Jul 2024.

## Builds on (most cited first, 13 of 13)

- [Deep Residual Learning for Image Recognition](https://mlsanity.com/paper/1512.03385/) (2015)
- [A Style-Based Generator Architecture for Generative Adversarial Networks](https://mlsanity.com/paper/1812.04948/) (2018)
- [Progressive Growing of GANs for Improved Quality, Stability, and Variation](https://mlsanity.com/paper/1710.10196/) (2017)
- [Unsupervised Representation Learning with Deep Convolutional Generative Adversarial Networks](https://mlsanity.com/paper/1511.06434/) (2015)
- [Alias-Free Generative Adversarial Networks](https://mlsanity.com/paper/2106.12423/) (2021)
- [Generative Adversarial Networks: An Overview](https://mlsanity.com/paper/1710.07035/) (2017)
- [Unlabeled Samples Generated by GAN Improve the Person Re-identification Baseline in vitro](https://mlsanity.com/paper/1701.07717/) (2017)
- [GAN-based Synthetic Medical Image Augmentation for increased CNN Performance in Liver Lesion Classification](https://mlsanity.com/paper/1803.01229/) (2018)
- [Cross-modality image synthesis from unpaired data using CycleGAN: Effects of gradient consistency loss and training data size](https://mlsanity.com/paper/1803.06629/) (2018)
- [A review of Generative Adversarial Networks (GANs) and its applications in a wide variety of disciplines -- From Medical to Remote Sensing](https://mlsanity.com/paper/2110.01442/) (2021)
- [Hexagonal Image Processing in the Context of Machine Learning: Conception of a Biologically Inspired Hexagonal Deep Learning Framework](https://mlsanity.com/paper/1911.11251/) (2019)
- [Improving Automated Visual Fault Detection by Combining a Biologically Plausible Model of Visual Attention with Deep Learning](https://mlsanity.com/paper/2102.06955/) (2021)
- [A Novel Visual Fault Detection and Classification System for Semiconductor Manufacturing Using Stacked Hybrid Convolutional Neural Networks](https://mlsanity.com/paper/1911.11250/) (2019)

## Built on by (most cited first, 1 of 1)

- [Hybrid Synthetic Data Generation with Domain Randomization Enables Zero-Shot Vision-Based Part Inspection Under Extreme Class Imbalance](https://mlsanity.com/paper/2512.00125/) (2025)

## Abstract (arXiv)

In semiconductor manufacturing, the wafer dicing process is central yet vulnerable to defects that significantly impair yield - the proportion of defect-free chips. Deep neural networks are the current state of the art in (semi-)automated visual inspection. However, they are notoriously known to require a particularly large amount of data for model training. To address these challenges, we explore the application of generative adversarial networks (GAN) for image data augmentation and classification of semiconductor wafer dicing induced defects to enhance the variety and balance of training data for visual inspection systems. With this approach, synthetic yet realistic images are generated that mimic real-world dicing defects. We employ three different GAN variants for high-resolution image synthesis: Deep Convolutional GAN (DCGAN), CycleGAN, and StyleGAN3. Our work-in-progress results demonstrate that improved classification accuracies can be obtained, showing an average improvement of up to 23.1 % from 65.1 % (baseline experiment) to 88.2 % (DCGAN experiment) in balanced accuracy, which may enable yield optimization in production.