# Deep Learning Enables Large Depth-of-Field Images for Sub-Diffraction-Limit Scanning Superlens Microscopy

arXiv: https://arxiv.org/abs/2310.17997 · HTML: https://mlsanity.com/paper/2310.17997/

## Key facts

- No citing papers in the map yet (data through 14 Oct 2026).
- Builds on 10 of its 24 references that are in the map.
- First posted on arXiv 27 Oct 2023.

## Builds on (most cited first, 10 of 10)

- [Image-to-Image Translation with Conditional Adversarial Networks](https://mlsanity.com/paper/1611.07004/) (2016)
- [Photo-Realistic Single Image Super-Resolution Using a Generative Adversarial Network](https://mlsanity.com/paper/1609.04802/) (2016)
- [Enhanced Deep Residual Networks for Single Image Super-Resolution](https://mlsanity.com/paper/1707.02921/) (2017)
- [Image Super-Resolution Using Very Deep Residual Channel Attention Networks](https://mlsanity.com/paper/1807.02758/) (2018)
- [ESRGAN: Enhanced Super-Resolution Generative Adversarial Networks](https://mlsanity.com/paper/1809.00219/) (2018)
- [Accurate Image Super-Resolution Using Very Deep Convolutional Networks](https://mlsanity.com/paper/1511.04587/) (2015)
- [Residual Dense Network for Image Super-Resolution](https://mlsanity.com/paper/1802.08797/) (2018)
- [Deep Laplacian Pyramid Networks for Fast and Accurate Super-Resolution](https://mlsanity.com/paper/1704.03915/) (2017)
- [Deeply-Recursive Convolutional Network for Image Super-Resolution](https://mlsanity.com/paper/1511.04491/) (2015)
- [MemNet: A Persistent Memory Network for Image Restoration](https://mlsanity.com/paper/1708.02209/) (2017)

## Abstract (arXiv)

Scanning electron microscopy (SEM) is indispensable in diverse applications ranging from microelectronics to food processing because it provides large depth-of-field images with a resolution beyond the optical diffraction limit. However, the technology requires coating conductive films on insulator samples and a vacuum environment. We use deep learning to obtain the mapping relationship between optical super-resolution (OSR) images and SEM domain images, which enables the transformation of OSR images into SEM-like large depth-of-field images. Our custom-built scanning superlens microscopy (SSUM) system, which requires neither coating samples by conductive films nor a vacuum environment, is used to acquire the OSR images with features down to ~80 nm. The peak signal-to-noise ratio (PSNR) and structural similarity index measure values indicate that the deep learning method performs excellently in image-to-image translation, with a PSNR improvement of about 0.74 dB over the optical super-resolution images. The proposed method provides a high level of detail in the reconstructed results, indicating that it has broad applicability to chip-level defect detection, biological sample analysis, forensics, and various other fields.