# Diffusion Probabilistic Model Based Accurate and High-Degree-of-Freedom Metasurface Inverse Design

arXiv: https://arxiv.org/abs/2304.13038 · HTML: https://mlsanity.com/paper/2304.13038/

## Key facts

- Cited by 9 papers in the map (data through 14 Oct 2026).
- Placed in Flow matching, time series and science, one of 14 directions in Diffusion models.
- Builds on 17 of its 48 references that are in the map.
- First posted on arXiv 25 Apr 2023.

## Placed in

- Diffusion models / [Flow matching, time series and science](https://mlsanity.com/diffusion/flow-matching-time-series-and-science/)

## Builds on (most cited first, 17 of 17)

- [Denoising Diffusion Probabilistic Models](https://mlsanity.com/paper/2006.11239/) (2020)
- [Diffusion Models Beat GANs on Image Synthesis](https://mlsanity.com/paper/2105.05233/) (2021)
- [Photorealistic Text-to-Image Diffusion Models with Deep Language Understanding](https://mlsanity.com/paper/2205.11487/) (2022)
- [Classifier-Free Diffusion Guidance](https://mlsanity.com/paper/2207.12598/) (2022)
- [Zero-Shot Text-to-Image Generation](https://mlsanity.com/paper/2102.12092/) (2021)
- [Improved Training of Wasserstein GANs](https://mlsanity.com/paper/1704.00028/) (2017)
- [Conditional Generative Adversarial Nets](https://mlsanity.com/paper/1411.1784/) (2014)
- [Unsupervised Representation Learning with Deep Convolutional Generative Adversarial Networks](https://mlsanity.com/paper/1511.06434/) (2015)
- [Image Super-Resolution via Iterative Refinement](https://mlsanity.com/paper/2104.07636/) (2021)
- [Palette: Image-to-Image Diffusion Models](https://mlsanity.com/paper/2111.05826/) (2021)
- [Tackling the Generative Learning Trilemma with Denoising Diffusion GANs](https://mlsanity.com/paper/2112.07804/) (2021)
- [Global optimization of dielectric metasurfaces using a physics-driven neural network](https://mlsanity.com/paper/1906.04157/) (2019)
- [A Generative Model for Inverse Design of Metamaterials](https://mlsanity.com/paper/1805.10181/) (2018)
- [Designing nanophotonic structures using conditional-deep convolutional generative adversarial networks](https://mlsanity.com/paper/1903.08432/) (2019)
- [Multifunctional Metasurface Design with a Generative Adversarial Network](https://mlsanity.com/paper/1908.04851/) (2019)
- [Freeform Diffractive Metagrating Design Based on Generative Adversarial Networks](https://mlsanity.com/paper/1811.12436/) (2018)
- [Manifold Learning for Knowledge Discovery and Intelligent Inverse Design of Photonic Nanostructures: Breaking the Geometric Complexity](https://mlsanity.com/paper/2102.04454/) (2021)

## Built on by (most cited first, 9 of 9)

- [An Agentic Framework for Autonomous Metamaterial Modeling and Inverse Design](https://mlsanity.com/paper/2506.06935/) (2025)
- [Chat to Chip: Large Language Model Based Design of Arbitrarily Shaped Metasurfaces](https://mlsanity.com/paper/2509.24196/) (2025)
- [Generative Inverse Design of Metamaterials with Functional Responses by Interpretable Learning](https://mlsanity.com/paper/2401.00003/) (2023)
- [Inverse Design of Diffractive Metasurfaces Using Diffusion Models](https://mlsanity.com/paper/2506.21748/) (2025)
- [Inverse Design of Metamaterials with Manufacturing-Guiding Spectrum-to-Structure Conditional Diffusion Model](https://mlsanity.com/paper/2506.07083/) (2025)
- [Data driven approaches in nanophotonics: A review of AI-enabled metadevices](https://mlsanity.com/paper/2510.00283/) (2025)
- [Physics-guided and fabrication-aware inverse design of photonic devices using diffusion models](https://mlsanity.com/paper/2504.17077/) (2025)
- [Machine-Learning-Assisted Photonic Device Development: A Multiscale Approach from Theory to Characterization](https://mlsanity.com/paper/2506.20056/) (2025)
- [Neural Adjoint Method for Meta-optics: Accelerating Volumetric Inverse Design via Fourier Neural Operators](https://mlsanity.com/paper/2604.17425/) (2026)

## Abstract (arXiv)

Conventional meta-atom designs rely heavily on researchers' prior knowledge and trial-and-error searches using full-wave simulations, resulting in time-consuming and inefficient processes. Inverse design methods based on optimization algorithms, such as evolutionary algorithms, and topological optimizations, have been introduced to design metamaterials. However, none of these algorithms are general enough to fulfill multi-objective tasks. Recently, deep learning methods represented by Generative Adversarial Networks (GANs) have been applied to inverse design of metamaterials, which can directly generate high-degree-of-freedom meta-atoms based on S-parameter requirements. However, the adversarial training process of GANs makes the network unstable and results in high modeling costs. This paper proposes a novel metamaterial inverse design method based on the diffusion probability theory. By learning the Markov process that transforms the original structure into a Gaussian distribution, the proposed method can gradually remove the noise starting from the Gaussian distribution and generate new high-degree-of-freedom meta-atoms that meet S-parameter conditions, which avoids the model instability introduced by the adversarial training process of GANs and ensures more accurate and high-quality generation results. Experiments have proven that our method is superior to representative methods of GANs in terms of model convergence speed, generation accuracy, and quality.