# STEM image analysis based on deep learning: identification of vacancy defects and polymorphs of MoS2

arXiv: https://arxiv.org/abs/2206.04272 · HTML: https://mlsanity.com/paper/2206.04272/

## Key facts

- Cited by 3 papers in the map (data through 14 Oct 2026).
- Builds on 1 of its 46 references that are in the map.
- First posted on arXiv 9 Jun 2022.

## Builds on (most cited first, 1 of 1)

- [Paradigm shift in electron-based crystallography via machine learning](https://mlsanity.com/paper/1902.03682/) (2019)

## Built on by (most cited first, 3 of 3)

- [Unsupervised segmentation of irradiationunicodex2010induced orderunicodex2010disorder phase transitions in electron microscopy](https://mlsanity.com/paper/2311.08585/) (2023)
- [Revealing the Evolution of Order in Materials Microstructures Using Multi-Modal Computer Vision](https://mlsanity.com/paper/2411.09896/) (2024)
- [Context-Aware Deep Learning for Defect Classification in Atomic-Resolution STEM](https://mlsanity.com/paper/2606.09419/) (2026)

## Abstract (arXiv)

Scanning transmission electron microscopy (STEM) is an indispensable tool for atomic-resolution structural analysis for a wide range of materials. The conventional analysis of STEM images is an extensive hands-on process, which limits efficient handling of high-throughput data. Here we apply a fully convolutional network (FCN) for identification of important structural features of two-dimensional crystals. ResUNet, a type of FCN, is utilized in identifying sulfur vacancies and polymorph types of MoS2 from atomic resolution STEM images. Efficient models are achieved based on training with simulated images in the presence of different levels of noise, aberrations, and carbon contamination. The accuracy of the FCN models toward extensive experimental STEM images is comparable to that of careful hands-on analysis. Our work provides a guideline on best practices to train a deep learning model for STEM image analysis and demonstrates FCN's application for efficient processing of a large volume of STEM data.